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Número de pieza | TQPHT | |
Descripción | pHEMT Foundry Service | |
Fabricantes | TriQuint Semiconductor | |
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Hay una vista previa y un enlace de descarga de TQPHT (archivo pdf) en la parte inferior de esta página. Total 5 Páginas | ||
No Preview Available ! Production Process
TQPHT
0.5 um pHEMT Foundry Service
Nitride
Metal 2
Metal 2 - 4um
Dielectric
Dielectric
Metal 1
Metal 1
Dielectric
MIM Metal
Metal 0
Metal 1 - 2um
NiCr
N+ Pseudomorphic
Channel
pHEMT
IsoIlasotiloantiIomnpIlmanptlant
MIM Capacitor
NiCr Resistor
Semi-Insulating GaAs Substrate
www.DataSheet4U.com
0.5 um pHEMT Device Cross-Section
Features
• D-Mode, -0.8 V Vp
• InGaAs Active Layer pHEMT
Process
• 0.5 um Optical Lithography
Gates
• 17 V D-G Breakdown Voltage
• High Density Interconnects:
• 2 Global
• 1 Local
• High-Q Passives
• Thin Film Resistors
• High Value Capacitors
• Backside Vias Optional
• Based on Production 0.25 µm
pHEMT and Passives Processes
• TOM3 FET Models Available
General Description
TriQuint’s 0.5 µm pHEMT process is based on our production
released 0.25 µm gate process. TQPHT substitutes lower cost
optical lithography in place of e-beam and adds TriQuint’s
unique thick metal scheme. This process is targeted for high
efficiency and linearity in power amplifiers, low noise amplifiers,
and linear, low loss and high isolation RF switch applications.
The TQPHT process offers a D-Mode pHEMT with a –0.8 V
pinch off. The three metal interconnecting layers are encapsu-
lated in a high performance dielectric that allows wiring flexibil-
ity, optimized die size and plastic packaging simplicity. Precision
NiCr resistors and high value MIM capacitors are included al-
lowing higher levels of integration, while maintaining smaller,
cost –effective die sizes.
Applications
• Highly Efficient and Linear
Power Amplifiers
• Low Loss, High Isolation
Switches for Wireless Trans-
ceivers and Basestations
• Higher Supply Voltage Applica-
tions
• Integrated RF Front Ends–
LNA, SW, PA
Fully Released
Production Process
Page 1 of 5; Rev 2.0 7/22/03
1 page Production Process
TQPHT
0.5 um pHEMT Foundry Service
Prototyping and Development
• Prototype Development Quick Turn (PDQ):
• Shared mask set
• Run monthly
• Hot Lot cycle time
• Prototype Wafer Option (PWO):
• Customer-specific masks; Customer schedule
• 2 wafers delivered
• Hot Lot cycle time
• With thinning and sawing; optional backside
vias
Design Tool Status
• Complete Design Manual Now
• Device Library of circuit elements: FETs, diodes, thin
film resistors, capacitors, inductors
• Design Kit for Agilent’s ADS design environment
• Design Kit planned for AWR Microwave Office
• Layout Library in GSD II format
• Cadence Development Kit with PCells
• Layout Rule Sets for Design Rule Check
• Qualified package models for supported package styles
Training
• GaAs Design Classes:
• Half-Day Introduction; Upon request
• Four-Day Technical Training; Fall and Spring at
TriQuint Oregon facility
• For Training & PDQ Schedules, please visit:
www.triquint.com/foundry/
Process Qualification Status
• Mature process based on TQTx, 150-mm process
• Process released to production
• Full 150mm wafer Process Qualification complete
• For more information on Quality and Reliability, con-
tact TriQuint or visit:
www.triquint.com/manufacturing/QR/
Applications Support Services
• Tiling of GDSII stream files including PCM
• Design Rule Check services
• Layout Versus Schematic check services
• Packaging Development Engineering
• Test Development Engineering:
• On-wafer
• Packaged parts
• Thermal Analysis Engineering
• Yield Enhancement Engineering
• Part Qualification Services
• Failure Analysis
Manufacturing Services
• Mask making
• Production 150-mm wafer fab
• Wafer Thinning
• Wafer Sawing
• Substrate Vias
• DC Diesort Testing
• RF On-wafer testing
• Plastic Packaging
• RF Packaged Part Testing
Please contact your local TriQuint Semiconductor Representative/ Distributor
or Foundry Services Division for Additional information:
E-mail: [email protected] Phone: (503) 615-9000 Fax: (503) 615-8905
TriQuint Semiconductor
2300 NE Brookwood Pkwy
Hillsboro, Oregon 97124
Semiconductors for Communications
www.triquint.com
Page 5 of 5; Rev 2.0 7/22/03
Phone: 503-615-9000
Fax: 503-615-8905
Email: [email protected]
5 Page |
Páginas | Total 5 Páginas | |
PDF Descargar | [ Datasheet TQPHT.PDF ] |
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